Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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04/05/2005
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Application #:
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10256377
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Filing Dt:
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09/27/2002
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Publication #:
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Pub Dt:
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04/01/2004
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Inventors:
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Henry N. Chapman, John S. Taylor
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Title:
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ETCHED-MULTILAYER PHASE SHIFTING MASKS FOR EUV LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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1111 FRANKLIN STREET |
OAKLAND, CALIFORNIA 94607-5200 |
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JOHN P. WOOLDRIDGE |
1334 RIDGESTONE COURT |
LIVERMORE, CA 94551 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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C/O INTEL CORPORATION |
SC1-2-B1, 3065 BOWERS AVE. |
SANTA CLARA, CALIFORNIA 95052-8119 |
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LAWRENCE LIVERMORE NAT. LABORATORY |
ALAN H. THOMPSON |
BOX 808, L-703 |
LIVERMORE, CA 94551 |
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Assignment:
3
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CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
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P.O. BOX 808 (L-376) |
LIVERMORE, CALIFORNIA 94550 |
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U.S. DEPARTMENT OF ENERGY |
WILLIAM C. DAUBENSPECK |
LAWRENCE LIVERMORE NATIONAL LABORATORY |
P.O. BOX 808 (MS L-376) |
LIVERMORE, CA 94550 |
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