Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10665165
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Filing Dt:
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09/18/2003
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Publication #:
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Pub Dt:
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04/01/2004
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Inventor:
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J. Young J. Paik
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Title:
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Feedback control of a chemical mechanical polishing process for multi-layered films
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
P.O. BOX 450A |
SANTA CLARA, CALIFORNIA 95052 |
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APPLIES MATERIALS, INC. |
MARY ROSE SCOZZAFAVA |
3050 BOWERS AVENUE, P.O. BOX 450A |
LEGAL AFFAIRS DEPARTMENT, PATENT COUNSEL |
SANTA CLARA, CA 95008 |
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