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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10665165
Filing Dt:
09/18/2003
Publication #:
Pub Dt:
04/01/2004
Inventor:
J. Young J. Paik
Title:
Feedback control of a chemical mechanical polishing process for multi-layered films
Assignment: 1
Reel/Frame:
014551/0914Recorded: 09/18/2003Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
09/18/2003
Assignee:
3050 BOWERS AVENUE
P.O. BOX 450A
SANTA CLARA, CALIFORNIA 95052
Correspondent:
APPLIES MATERIALS, INC.
MARY ROSE SCOZZAFAVA
3050 BOWERS AVENUE, P.O. BOX 450A
LEGAL AFFAIRS DEPARTMENT, PATENT COUNSEL
SANTA CLARA, CA 95008

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