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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10663558
Filing Dt:
09/16/2003
Publication #:
Pub Dt:
04/08/2004
Inventors:
Tadashi Ishizaki, Kazuyoshi Takeda, Tohru Watari
Title:
Apparatus and method for substrate processing
Assignment: 1
Reel/Frame:
014517/0972Recorded: 09/16/2003Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
09/08/2003
Exec Dt:
09/08/2003
Exec Dt:
09/08/2003
Assignee:
2-28-18 SHUKUGAWARA TAMA-KU KAWASAKI-SHI
KANAGAWA-KEN, JAPAN 214-0021
Correspondent:
SLATER & MATSIL, L.L.P.
IRA S. MATSIL
17950 PRESTON RD.
SUITE 1000
DALLAS, TX 75252-5793

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