Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10661439
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Filing Dt:
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09/11/2003
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Publication #:
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Pub Dt:
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04/29/2004
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Inventors:
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Cheol Ho Shin, Byoung Ha Cho, Sang Tae Sim, Jung Soo Kim, Won Hyung Lee, Dae Sik Kim
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Title:
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ALD apparatus and ALD method for manufacturing semiconductor device
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| #5-1 CHAAM-DONG, CHEONAN-SI, |
| CHUNGCHEONGNAM-DO 330-200, KOREA, REPUBLIC OF |
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| BELL, BOYD & LLOYD LLC |
| B. JOE KIM |
| P.O. BOX 1135 |
| CHICAGO, IL 60690-1135 |
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