Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/26/2005
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Application #:
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10289151
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Filing Dt:
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11/05/2002
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Publication #:
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Pub Dt:
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05/06/2004
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Inventors:
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Wenbing Yun, Yuxin Wang, Kenneth W. Nill
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Title:
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ACHROMATIC FRESNEL OPTICS BASED LITHOGRAPHY FOR SHORT WAVELENGTH ELECTROMAGNETIC RADIATIONS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4075A SPRING DRIVE |
CONCORD, CALIFORNIA 94520 |
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O'BANION & RITCHEY LLP |
JOHN P. O'BANION |
400 CAPITOL MALL, SUITE 1550 |
SACRAMENTO, CA 95814 |
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