Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10302924
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Filing Dt:
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11/25/2002
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Publication #:
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Pub Dt:
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05/27/2004
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Inventors:
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Ta-Kuang Chang, Chin-Lung Wu, Chin-Tsung Chen, Tsang-Jung Lin, Lee-Zen Chen
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Title:
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SEMICONDUCTOR PROCESS APPARATUS AND SMIF POD USED THEREIN
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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NO. 16, CREATION RD. 1 |
SCIENCE-BASED INDUSTRIAL PARK |
HSIN CHU, TAIWAN R.O.C. |
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BIRCH, STEWART, KOLASCH & BIRCH, LLP |
JOE MCKINNEY MUNCY |
P.O. BOX 747 |
FALLS CHURCH, VA 22040-0747 |
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