Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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06/20/2006
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Application #:
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10706971
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Filing Dt:
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11/14/2003
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Publication #:
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Pub Dt:
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05/27/2004
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Inventors:
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Takaei Sasaki, Noriyuki Harashima, Satoshi Aoyama, Shouichi Sakamoto
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Title:
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METHOD AND APPARATUS FOR DRY-ETCHING HALF-TONE PHASE-SHIFT FILMS, HALF-TONE PHASE-SHIFT PHOTOMASKS AND METHOD FOR THE PREPARATION THEREOF, AND SEMICONDUCTOR CIRCUITS AND METHOD FOR THE FABRICATION THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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1753, SHIMONUMABE, NAKAHARA-KU |
KAWASAKI-SHI, KANAGAWA, JAPAN 211-8668 |
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MCDERMOTT WILL & EMERY LLP |
500 NORTH CAPITOL STREET, N.W. |
WASHINGTON, DC 20001 |
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Assignment:
2
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2-24, TOYOSU 3-CHOME, KOUTOU-KU |
TOKYO, JAPAN |
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MATTINGLY & MALUR, PC |
1800 DIAGONAL ROAD |
SUITE 210 |
ALEXANDRIA, VA 22314 |
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