Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10727250
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Filing Dt:
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12/04/2003
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Publication #:
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Pub Dt:
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06/10/2004
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Inventors:
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Yukihiko Nakata, Kazufumi Azuma, Tetsuya Okamoto, Masashi Goto
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Title:
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Plasma processing apparatus and plasma processing method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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292 YOSHIDA-CHO, TOTSUKA-KU |
YOKOHAMA 244-0817, JAPAN |
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OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST |
1940 DUKE STREET |
ALEXANDRIA, VA 22314 |
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