Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10313980
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Filing Dt:
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12/06/2002
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Publication #:
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Pub Dt:
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06/10/2004
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Inventors:
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Lyndon Graham, Robert A. Weaver, Gregory J. Wilson, Kyle M. Hanson
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Title:
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Apparatus and methods for transferring heat during chemical processing of microelectronic workpieces
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 655 WEST RESERVE DRIVE |
| KALISPELL, MONTANA 59901 |
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| PERKINS COIE LLP |
| JOHN M. WECHKIN |
| P.O. BOX 1247 |
| SEATTLE, WASHINGTON 98111-1247 |
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