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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10327209
Filing Dt:
12/20/2002
Publication #:
Pub Dt:
06/24/2004
Inventors:
Soovo Sen, Maosheng Zhao, Inna Shmurun, Ju-Hyung Lee, Shankar Venkataraman
Title:
Blocker plate bypass design to improve clean rate at the edge of the chamber
Assignment: 1
Reel/Frame:
013635/0410Recorded: 12/20/2002Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
12/19/2002
Exec Dt:
12/19/2002
Exec Dt:
12/19/2002
Exec Dt:
12/19/2002
Exec Dt:
12/19/2002
Assignee:
P.O. BOX 450-A
SANTA CLARA, CALIFORNIA 95052
Correspondent:
PATENT COUNSEL
APPLIED MATERIALS, INC.
P.O. BOX 450-A
SANTA CLARA, CA 95052

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