Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/20/2007
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Application #:
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10705816
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Filing Dt:
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11/12/2003
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Publication #:
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Pub Dt:
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07/15/2004
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Inventors:
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Joeri Lof, Joannes Theodoor De Smit, Roelof Aeilko Ritsema, Klaus Simon et al
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Title:
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD WITH SUBSTRATE MEASUREMENT NOT THROUGH LIQUID
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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DE RUN 6501 |
DR VELDHOVEN, NETHERLANDS NL-5504 |
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PILLSBURY WINTHROP LLP |
JEAN-PAUL HOFFMAN |
INTELLECTUAL PROPERTY GROUP |
P.O. BOX 10500 |
MCLEAN, VA 22102 |
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