Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10651433
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Filing Dt:
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08/29/2003
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Publication #:
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Pub Dt:
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08/05/2004
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Inventor:
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Albert Wang
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Title:
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Gas tube end cap for a microwave plasma generator
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 108 CHERRY HILL DRIVE |
| ATTN: PATENT LAW DEPARTMENT |
| BEVERLY, MASSACHUSETTS 01915 |
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| AXCELIS TECHNOLOGIES, INC. |
| DENIS A. ROBITAILLE |
| ATTN: PATENT LAW DEPT. |
| 108 CHERRY HILL DRIVE |
| BEVERLY, MA 01915 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 55 CHERRY HILL DRIVE |
| BEVERLY, MASSACHUSETTS 01915 |
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| KNOBBE, MARTENS, OLSON, ET AL. |
| ADEEL S. AKHTAR |
| 2040 MAIN STREET |
| FOURTEENTH FLOOR |
| IRVINE, CA 92614 |
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