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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
07/24/2007
Application #:
10756841
Filing Dt:
01/14/2004
Publication #:
Pub Dt:
08/26/2004
Inventors:
Paulus Antonius Andreas Teunissen, Petrus Johannes Broodbakker et al
Title:
LITHOGRAPHIC APPARATUS, LEVEL SENSOR, METHOD OF INSPECTION, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
Assignment: 1
Reel/Frame:
015319/0088Recorded: 05/07/2004Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
04/14/2004
Exec Dt:
04/16/2004
Exec Dt:
04/14/2004
Assignee:
DE RUN, 6501
NL-5504 DR VELDOHEN, NETHERLANDS
Correspondent:
PILLSBURY WINTHROP LLP
KERRY HARTMAN
P.O. BOX 10500
MCLEAN, VA 22102

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