Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/24/2007
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Application #:
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10807439
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Filing Dt:
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03/24/2004
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Publication #:
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Pub Dt:
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09/30/2004
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Inventor:
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Andrej S. Mitrovic
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Title:
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METHOD AND SYSTEM FOR MONITORING RF IMPEDANCE TO DETERMINE CONDITIONS OF A WAFER ON AN ELECTROSTATIC CHUCK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO 107, JAPAN |
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| PILLSBURY WINTHROP LLP |
| DALE S. LAZAR |
| INTELLECTUAL PROPERTY GROUP |
| P.O. BOX 10500 |
| MCLEAN, VA 22102 |
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