Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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10/03/2006
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Application #:
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10738976
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Filing Dt:
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12/19/2003
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Publication #:
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Pub Dt:
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11/04/2004
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Inventors:
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Levinus Pieter Bakker, Bastiaan Matthias Mertens, Johann Trenkler, Markus Weiss et al
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Title:
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METHOD FOR CLEANING A SURFACE OF A COMPONENT OF A LITHOGRAPHIC PROJECTION APPARATUS, LITHOGRAPHIC PROJECTION APPARATUS, DEVICE MANUFACTURING METHOD AND CLEANING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| NL-5504 VELDHOVEN, NETHERLANDS |
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| CARL ZEISS-STRASSE 22 |
| D-73447 OBERKOCHEN, GERMANY |
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| PILLSBURY WINTHROP LLP |
| EMILY T. BELL |
| INTELLETUAL PROPERTY GROUP |
| P.O. BOX 10500 |
| MCLEAN, VA 22102 |
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Assignment:
2
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| RUDOLF-EBER-STRASSE 2 |
| 73447 OBERKOCHEN, GERMANY |
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| TIMOTHY A. FRENCH |
| FISH & RICHARDSON P.C. |
| ONE MARINA PARK DRIVE |
| BOSTON, MASSACHUSETTS 02210-1878 |
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