Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/04/2008
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Application #:
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10438221
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Filing Dt:
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05/15/2003
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Publication #:
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Pub Dt:
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11/11/2004
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Inventors:
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Geun-Young Yeom, Young-Joon Lee, Kyong-Nam Kim
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Title:
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INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS HAVING INTERNAL LINEAR ANTENNA FOR LARGE AREA PROCESSING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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53, MYUNGRYUNDONG 3GA, JONGRO-GU |
SEOUL 110-745, KOREA, REPUBLIC OF |
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FOLEY & LARDNER |
WILLIAM T. ELLIS |
WASHINGTON HARBOUR |
3000 K STREET, N.W., SUITE 500 |
WASHINGTON, D.C. 20007-5143 |
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