Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/24/2007
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Application #:
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10870871
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Filing Dt:
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06/16/2004
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Publication #:
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Pub Dt:
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11/18/2004
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Inventors:
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Maximilian A. Biberger, Paul E. Schilling
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Title:
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METHOD OF DEPOSITING METAL FILM AND METAL DEPOSITION CLUSTER TOOL INCLUDING SUPERCRITICAL DRYING/CLEANING MODULE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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| HAVERSTOCK & OWENS LLP |
| THOMAS B. HAVERSTOCK |
| 260 SHERIDAN AVENUE |
| SUITE 420 |
| PALO ALTO, CA 94306 |
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