Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10843265
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Filing Dt:
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05/10/2004
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Publication #:
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Pub Dt:
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11/25/2004
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Inventors:
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Brian S. Thornton, Anil K. Pant
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Title:
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Chemical mechanical planarization method and apparatus for improved process uniformity, reduced topography and reduced defects
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1176 ASTER AVENUE, UNIT C |
| SUNNYVALE, CALIFORNIA 94086 |
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| BLAKELY, SOKOLOFF, TAYLOR |
| & ZAFMAN LLP |
| 12400 WILSHIRE BOULEVARD |
| 7TH FLOOR |
| LOS ANGELES, CA 90025 |
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