Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/08/2005
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Application #:
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10487842
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Filing Dt:
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02/23/2004
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Publication #:
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Pub Dt:
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12/02/2004
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PCT #:
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JP0306239
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Inventors:
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Akira Kuibira, Hirohiko Nakata
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Title:
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HEATER MODULE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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5-33, KITAHAMA 4-CHOME |
CHUO-KU |
OSAKA-SHI, JAPAN 541-0041 |
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JAMES W. JUDGE |
RIVIERE SHUKUGAWA 3RD FL. |
3-1 WAKAMATSU-CHO |
NISHINOMIYA, JPX 662-0035 |
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