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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
06/14/2005
Application #:
10445728
Filing Dt:
05/27/2003
Publication #:
Pub Dt:
12/02/2004
Inventors:
Chiung-Fang Hsieh, Long-Fan Lin, Ching-Yi Chen, Shu-Shung Lin, Ching-Feng Yeh et al
Title:
PROCESS TOOL THROUGHPUT MONITORING SYSTEM AND METHOD
Assignment: 1
Reel/Frame:
014126/0059Recorded: 05/27/2003Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
12/04/2002
Exec Dt:
12/02/2002
Exec Dt:
12/02/2002
Exec Dt:
12/04/2002
Exec Dt:
12/02/2002
Exec Dt:
12/04/2002
Assignee:
16 LI-HSIN ROAD, SCIENCE BASED INDUSTRIAL PARK
HSINCHU, TAIWAN R.O.C.
Correspondent:
STOUT, UXA, BUYAN & MULLINS, LLP
KENTON R. MULLINS
4 VENTURE, SUITE 300
IRVINE, CA 92618

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