Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/24/2007
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Application #:
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10461068
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Filing Dt:
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06/12/2003
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Publication #:
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Pub Dt:
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12/16/2004
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Inventors:
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Gary Robertson, Robert Boyd Finlay
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Title:
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DUAL OUTLET NOZZLE FOR THE COMBINED EDGE BEAD REMOVAL AND BACKSIDE WASH OF SPIN COATED WAFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2900 SEMICONDUCTOR DRIVE |
| SANTA CLARA, CALIFORNIA 95051-8090 |
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| BEYER WEAVER & THOMAS LLP |
| JUSTIN A. WHITE |
| P.O. BOX 778 |
| BERKELEY, CA 94704-0778 |
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