Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10820752
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Filing Dt:
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04/09/2004
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Publication #:
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Pub Dt:
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12/16/2004
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Inventor:
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Shuho Motomura
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Title:
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Substrate processing system, coating apparatus, and coating method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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7-5, NAKA-OCHIAI 2-CHOME, SHINJUKU-KU |
TOKYO, JAPAN |
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SUGHRUE MION, PLLC |
DARRYL MEXIC |
2100 PENNSLYVANIA AVENUE |
WASHINGTON, D.C. 20037 |
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