Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/11/2007
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Application #:
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10855546
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Filing Dt:
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05/27/2004
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Publication #:
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Pub Dt:
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12/23/2004
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Inventors:
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Michael Fritze, Brian Tyrrell
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Title:
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METHOD AND SYSTEM OF LITHOGRAPHY USING MASKS HAVING GRAY-TONE FEATURES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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77 MASSACHUSETTS AVENUE |
CAMBRIDGE, MASSACHUSETTS 02139 |
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GAUTHIER & CONNORS LLP |
MATTHEW E. CONNORS |
225 FRANKLIN STREET |
BOSTON, MA 02110 |
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