Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10848587
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Filing Dt:
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05/19/2004
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Publication #:
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Pub Dt:
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01/13/2005
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Inventors:
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Koen Van Ingen Schenau, Marcel Mathijs Marie Dierichs
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Title:
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Method for coating a substrate for euv lithography and substrate with photoresist layer
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| NL-5504 DR VELDHOVEN, NETHERLANDS |
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| PILLSBURY WINTHROP LLP |
| JOHN P. DARLING |
| P.O. BOX 10500 |
| 1600 TYSONS BOULEVARD |
| MCLEAN, VA 22102 |
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