Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/07/2007
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Application #:
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10845521
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Filing Dt:
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05/14/2004
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Publication #:
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Pub Dt:
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01/27/2005
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Inventors:
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Henricus Wilhelmus Maria Van Buel, Cheng-Qun Gui, Alex De Vries
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Title:
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METHOD OF CALIBRATING A LITHOGRAPHIC APPARATUS, ALIGNMENT METHOD, COMPUTER PROGRAM, DATA STORAGE MEDIUM, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| NL-5504 DR VELDHOVEN, NETHERLANDS |
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| PILLSBURY WINTHROP LLP |
| KERRY T. HARTMAN |
| INTELLECTUAL PROPERTY GROUP |
| P.O. BOX 10500 |
| MCLEAN, VIRGINIA 22102 |
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