Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10626355
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Filing Dt:
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07/24/2003
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Publication #:
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Pub Dt:
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01/27/2005
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Inventors:
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Daniel Tang, Jiong Chen
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Title:
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Method of treating wafers with photoresist to perform metrology analysis using large current e-beam systems
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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116 SOUTH WOLFE ROAD |
SUNNYVALE, CALIFORNIA 94086 |
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BO-IN LIN |
13445 MANDOLI DRIVE |
LOS ALTOS HILLS, CA 94022 |
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