Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/09/2007
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Application #:
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10891835
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Filing Dt:
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07/15/2004
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Publication #:
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Pub Dt:
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02/03/2005
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Inventors:
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Mark P. Plemmons, Timothy R. Tiemeyer
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Title:
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DETECTION OF A WAFER EDGE USING COLLIMATED LIGHT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 80 WILSON WAY |
| WESTWOOD, MASSACHUSETTS 02090-1806 |
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| WEINGARTEN, SCHURGIN, GAGNEBIN & |
| LEBOVICI LLP |
| RICHARD E. GAMACHE |
| TEN POST OFFICE SQUARE |
| BOSTON, MA 02109 |
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