Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10870699
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Filing Dt:
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06/17/2004
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Publication #:
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Pub Dt:
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02/03/2005
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Inventors:
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Ralf Ziebold, Gerhard Kunkel
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Title:
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Method for forming an opening on an alternating phase shift mask
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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ST. MARTIN STR. 53 |
MUNICH, GERMANY 81669 |
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SLATER & MATSIL, L.L.P. |
IRA S. MATSIL |
17950 PRESTON ROAD |
SUITE 1000 |
DALLAS, TEXAS 75252-5793 |
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