Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10636154
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Filing Dt:
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08/07/2003
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Publication #:
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Pub Dt:
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02/10/2005
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Inventors:
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Sunny Wu, Bing-Hung Chen, Chih-Tien Chang, Ping-Hsu Chen
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Title:
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Method and apparatus for controlling spatial distribution of RF power and plasma density
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 6, LI-HSIN RD 6 |
| SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN R.O.C. |
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| TUNG & ASSOCIATES |
| RANDY W. TUNG |
| 838 W. LONG LAKE ROAD |
| SUITE 120 |
| BLOOMFIELD HILLS, MI 48302 |
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