Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/29/2008
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Application #:
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10864787
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Filing Dt:
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06/08/2004
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Publication #:
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Pub Dt:
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04/07/2005
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Inventors:
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Sam X. Sun, Chenghong Li
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Title:
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WET DEVELOPABLE HARD MASK IN CONJUNCTION WITH THIN PHOTORESIST FOR MICRO PHOTOLITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2401 BREWER DRIVE |
| ROLLA, MISSOURI 65401 |
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| HOVEY WILLIAMS LLP |
| TRACY L. BORNMAN |
| 2405 GRAND BOULEVARD |
| SUITE 400 |
| KANSAS CITY, MO 64108 |
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