Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/06/2007
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Application #:
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10919583
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Filing Dt:
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08/17/2004
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Publication #:
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Pub Dt:
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04/28/2005
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Inventors:
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Udo Dinger, Hans-Juergen Mann, Joerg Schultz, Karl-Heinz Schuster, Wolfgang Singer et al
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Title:
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ILLUMINATION SYSTEM PARTICULARLY FOR MICROLITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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CARL-ZEISS-STRASSE 22 |
73447 OBERKOCHEN, GERMANY |
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OHLANDT, GREELEY, RUGGIERO & PERLE, LLP |
ONE LANDMARK SQUARE, 10TH FLOOR |
STAMFORD, CT 06901 |
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