Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/30/2007
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Application #:
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10693202
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Filing Dt:
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10/24/2003
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Publication #:
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Pub Dt:
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04/28/2005
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Inventors:
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Sia Kim Tan, Qun Ying Lin, Soon Yoeng Tan, Huey Ming Chong
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Title:
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METHOD FOR DUAL DAMASCENE PATTERNING WITH SINGLE EXPOSURE USING TRI-TONE PHASE SHIFT MASK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 60 WOODLANDS INDUSTRIAL PARK D, STREET 2 |
| SINGAPORE, SG, SINGAPORE 7384066 |
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| WILLIAM J. STOFFEL |
| 1735 MARKET ST - STE A |
| PMB 455 |
| PHILADELPHIA, PA 19103 |
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