Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/07/2006
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Application #:
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11016410
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Filing Dt:
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12/17/2004
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Publication #:
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Pub Dt:
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05/12/2005
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Inventors:
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Nils Johansson, Boguslaw A. Swedek, Manoocher Birang
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Title:
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COMBINED EDDY CURRENT SENSING AND OPTICAL MONITORING FOR CHEMICAL MECHANICAL POLISHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATENT COUNSEL |
| APPLIED MATERIALS, INC. |
| LEGAL AFFAIRS DEPARTMENT |
| P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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