Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/19/2005
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Application #:
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10704982
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Filing Dt:
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11/12/2003
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Publication #:
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Pub Dt:
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05/12/2005
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Inventors:
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Sudhakar Balijepalli, Dale J. Aldrich, Laura A. Grier, Michael E. Mills
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Title:
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MATERIALS AND METHODS FOR LOW PRESSURE CHEMICAL-MECHANICAL PLANARIZATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| WASHINGTON STREET, 1790 BUILDING |
| MIDLAND, MICHIGAN 48674 |
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| HARNESS, DICKEY & PIERCE, P.L.C. |
| P.O. BOX 8910 |
| RESTON, VA 20195 |
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