Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10723298
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Filing Dt:
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11/25/2003
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Publication #:
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Pub Dt:
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05/26/2005
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Inventors:
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Marc Aho, Daniel Tran
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Title:
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Compact wafer handling system with single axis robotic arm and prealigner-cassette elevator
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4051 BURTON DRIVE |
| SANTA CLARA, CALIFORNIA 95054 |
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| LUMEN |
| MARAK ALBOSZTA |
| 2345 YALE STREET, 2ND FLOOR |
| PALO ALTO, CA 94306 |
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