Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10724454
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Filing Dt:
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11/28/2003
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Publication #:
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Pub Dt:
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06/02/2005
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Inventors:
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Sang H. Ahn, Sudha Rathi, Heraldo L. Bothelho
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Title:
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Maintenance of photoresist adhesion and activity on the surface of dielectric ARCS for 90 nm feature sizes
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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APPLIED MATERIALS, INC. |
ROBERT W. MULCAHY |
PO. BOX 1450 |
SANTA CLARA, CA 95052 |
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