Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/28/2006
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Application #:
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10999183
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Filing Dt:
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11/30/2004
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Publication #:
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Pub Dt:
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06/16/2005
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Inventors:
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In-su Ha, Yoon-bon Koo, Hyun-seok Lim, Seung-cheol Choi, Cheon-su Han
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Title:
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METHOD OF CLEANING SEMICONDUCTOR DEVICE FABRICATION APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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416, MAETAN-DONG, YEONGTONG-GU, SUWON-SI |
GYEONGGI-DO, KOREA, REPUBLIC OF |
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ADAM C. VOLENTINE |
33289 |
VOLENTINE FRANCOS & WHITT, PLLC |
1951 FREEDOM DRIVE, SUITE 1260 |
RESTON, VA 20190 |
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