Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/29/2009
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Application #:
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11037178
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Filing Dt:
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01/19/2005
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Publication #:
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Pub Dt:
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07/07/2005
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Inventor:
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Sherman K. Poultney
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Title:
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GRATING FOR EUV LITHOGRAPHIC SYSTEM ABERRATION MEASUREMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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DE RUN 6501 |
NL-5504 DR VELDHOVEN, NETHERLANDS |
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STERNE, KESSLER, GOLDSTEIN ET AL. |
C/O GEORGE S. BARDMESSER |
1100 NEW YORK AVENUE, N.W. |
WASHINGTON, D.C. 20005-3934 |
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