Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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07/29/2008
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Application #:
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11014199
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Filing Dt:
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12/16/2004
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Publication #:
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Pub Dt:
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07/14/2005
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Inventors:
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Toralf Gruner, Michael Totzeck, Damian Fiolka, Wilhelm Ulrich, Gerhard Fuerter
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Title:
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OPTICAL SYSTEM, IN PARTICULAR ILLUMINATION SYSTEM, OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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CARL-ZEISS-STR. 22 |
OBERKOCHEN, GERMANY D-73447 |
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JODY L. FACTOR |
FACTOR & LAKE, LTD. |
1327 W. WASHINGTON BOULEVARD |
SUITE 5G/H |
CHICAGO, ILLINOIS 60607 |
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Assignment:
2
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RUDOLF-EBER-STRASSE 2 |
73447 OBERKOCHEN, GERMANY |
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TIMOTHY A. FRENCH |
FISH & RICHARDSON P.C. |
ONE MARINA PARK DRIVE |
BOSTON, MASSACHUSETTS 02210-1878 |
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