Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/11/2006
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Application #:
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10911334
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Filing Dt:
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08/04/2004
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Publication #:
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Pub Dt:
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08/18/2005
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Inventor:
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Malcolm W. McGeoch
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Title:
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INJECTION PINCH DISCHARGE EXTREME ULTRAVIOLET SOURCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 20 CHAPEL STREET, C512 |
| BROOKLINE, MA 02446-5478, MASSACHUSETTS |
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| WILLIAM R. MCCLELLAN |
| WOLD, GREENFIELD & SACKS, P.C. |
| 600 ATLANTA AVENUE |
| BOSTON, MA 02210-2206 |
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