Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/17/2006
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Application #:
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11087071
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Filing Dt:
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03/23/2005
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Publication #:
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Pub Dt:
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08/25/2005
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Inventors:
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Merritt Funk, Raymond Peterson
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Title:
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METHOD AND APPARATUS FOR THE MONITORING AND CONTROL OF A SEMICONDUCTOR MANUFACTURING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-8485 |
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| PILLSBURY WINTHROP SHAW PITTMAN LLP |
| P.O. BOX 10500 |
| 1600 TYSONS BOULEVARD |
| MCLEAN, VIRGINIA 22102 |
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