Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11111041
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Filing Dt:
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04/21/2005
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Publication #:
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Pub Dt:
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09/08/2005
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Inventor:
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Eric J. Bergman
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Title:
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REMOVING PHOTORESIST FROM A WORKPIECE USING WATER AND OZONE AND A PHOTORESIST PENETRATING ADDITIVE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 655 WEST RESERVE DRIVE |
| KALISPELL, MONTANA 59901 |
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| PERKINS COIE LLP/SEMITOOL |
| PO BOX 1208 |
| SEATTLE, WA 98111-1208 |
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