Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/16/2006
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Application #:
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11154130
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Filing Dt:
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06/15/2005
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Publication #:
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Pub Dt:
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10/13/2005
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Inventor:
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Henry A. Hill
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Title:
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INTERFEROMETRIC SERVO CONTROL SYSTEM FOR STAGE METROLOGY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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21 LAUREL BROOK ROAD |
MIDDLEFIELD, CONNECTICUT 06455-0448 |
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MARC M. WEFERS, PH.D., J.D. |
FISH & RICHARSON P.C. |
225 FRANKLIN STREET |
BOSTON, MA 02110 |
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