Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/27/2007
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Application #:
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11108716
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Filing Dt:
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04/19/2005
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Publication #:
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Pub Dt:
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10/27/2005
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Inventor:
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Hiroyoshi Kubo
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Title:
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EXPOSURE APPARATUS HAVING SEPARATELY SUPPORTED FIRST AND SECOND SHADES AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-30-2, SHIMOMARUKO, |
| OHTA-KU, TOKYO, JAPAN |
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| FITZPATRICK, CELLA, HARPER & SCINTO |
| 30 ROCKEFELLER PLAZA |
| NEW YORK, NEW YORK 10112-3801 |
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