Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/30/2006
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Application #:
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10918483
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Filing Dt:
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08/16/2004
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Publication #:
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Pub Dt:
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11/03/2005
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Inventors:
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Ching-Chin Lai, Fang-Cheng Chang, Ming-En Chen, Jung-Hsiang Chu, Kuang-Ling Hsiao et al
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Title:
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MONITORING METHOD, PROCESS AND SYSTEM FOR PHOTORESIST REGENERATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 195, SEC. 4, CHUNG HSING RD. CHUTUNG |
| HSINCHU, TAIWAN R.O.C. |
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| BACON & THOMAS, PLLC |
| EUGENE MAR |
| 625 SLATERS LANE, FOURTH FLOOR |
| ALEXANDRIA, VIRGINIA 22314 |
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