Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/11/2006
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Application #:
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11185066
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Filing Dt:
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07/20/2005
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Publication #:
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Pub Dt:
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11/17/2005
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Inventors:
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Birgit Kurz, Toralf Gruner, Alexander Kohl
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Title:
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METHOD FOR IMPROVING THE IMAGING PROPERTIES OF AT LEAST TWO OPTICAL ELEMENTS AND PHOTOLITHOGRAPHIC FABRICATION METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CARL-ZEISS-STRASSE 22 |
| 73447 OBERKOCHEN, GERMANY |
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| FISH & RICHARDSON PC |
| P.O. BOX 1022 |
| MINNEAPOLIS, MN 55440-1022 |
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