Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/30/2007
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Application #:
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11101235
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Filing Dt:
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04/07/2005
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Publication #:
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Pub Dt:
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12/01/2005
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Inventors:
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Martin Brunotte, Jurgen Hartmaier, Hubert Holderer, Winfried Kaiser, Alexander Kohl et al
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Title:
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PROJECTION LENS AND MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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CARL-ZEISS-STRASSE 22 |
OBERKOCHEN, GERMANY 73447 |
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SEAN P. DALEY |
FISH & RICHARDSON P.C. |
225 FRANKLIN STREET |
BOSTON, MA 02110-2804 |
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