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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
Issue Dt:
08/15/2006
Application #:
10882684
Filing Dt:
07/02/2004
Publication #:
Pub Dt:
01/05/2006
Inventors:
Johannes Hubertus Josephina Moors, Uwe Mickan
Title:
CALIBRATION APPARATUS AND METHOD OF CALIBRATING A RADIATION SENSOR IN A LITHOGRAPHIC APPARATUS
Assignment: 1
Reel/Frame:
015915/0029Recorded: 10/21/2004Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
10/05/2004
Exec Dt:
10/14/2004
Assignee:
DE RUN 6501
NL-5504 DR VELDHOVEN, NETHERLANDS
Correspondent:
PILLSBURY WINTHROP LLP, IP GROUP
E. RICO HERNANDEZ
P.O. BOX 10500
MCLEAN, VA 22102
Assignment: 2
Reel/Frame:
016605/0889Recorded: 05/27/2005Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
10/05/2004
Exec Dt:
10/14/2004
Assignee:
DE RUN 6501
NL-5504 DR VELDHOVEN, NETHERLANDS
Correspondent:
PILLSBURY WINTHROP LLP
PO BOX 10500
MCLEAN, VA 22102

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