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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
10971002
Filing Dt:
10/25/2004
Publication #:
Pub Dt:
01/26/2006
Inventors:
Timo Moeller, Martin Ross-Messemer, Frank Hoeller, Sascha Bleidistel
Title:
Mirror arrangement and method of manufacturing thereof, optical system and lithographic method of manufacturing a miniaturized device
Assignment: 1
Reel/Frame:
016553/0531Recorded: 05/09/2005Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
11/29/2004
Exec Dt:
12/13/2004
Exec Dt:
12/13/2004
Exec Dt:
11/30/2004
Assignee:
CARL-ZEISS-STRASSE 22
OBERKOCHEN, GERMANY 73447
Correspondent:
JONES DAY
2882 SAND HILL ROAD, SUITE 240
MENLO PARK, CA 94025-7064

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