Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11205017
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Filing Dt:
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08/17/2005
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Publication #:
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Pub Dt:
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02/23/2006
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Inventors:
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Shigeki Nojima, Hiroshi Motoki, Takahiro Ikeda, Satoshi Tanaka, Takeshi Ito
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Title:
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Pattern measuring method, pattern measuring apparatus, photo mask manufacturing method, semiconductor device manufacturing method, and computer program product
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO, JAPAN 105-8001 |
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| FINNEGAN, HENDERSON, FARABOW, GARRETT & |
| DUNNER, L.L.P. |
| 901 NEW YORK AVENUE, NW |
| WASHINGTON, D.C. 20001-4413 |
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